MUMBAI, India, June 24 -- Intellectual Property India has published a patent application (202647069760 A) filed by Asml Netherlands B. V. on June 03, 2026, for Substrate Support, Substrate Support System And Method To Clamp A Substrate On A Substrate Support.
Inventors include Boshouwers, Augustinus, Hubert, Maria; Gijsbertsen, Arjan; Kramer, Gijs; De Groot, Antonius, Franciscus, Johannes; and Van Beuzekom, Aart, Adrianus.
The application for the patent was published on June 12, 2026, under issue no. 24/2026.
Abstract: A substrate support configured to support a substrate is provided, the substrate support comprises a main support body having a support surface and a flexible support element. The flexible support element comprises a first side to support the substrate and a second side to be supported on the support surface of the main support body, the substrate support further comprises a first clamping device to clamp the flexible support element on the substrate and a second clamping device to clamp the flexible support element on the main support body. The flexible support element has a flexibility that allows the flexible support element to adapt its shape to the substrate having a non-planar shape by a clamping force of the first clamping device when clamping the flexible support element on the substrate with the first clamping device.
Disclaimer: Curated by HT Syndication.
