MUMBAI, India, Aug. 31 -- Intellectual Property India has published a patent application (202514122784 A) filed by Kistler Holding AG on December 05, 2025, for Sensor Device.
Inventors include Pirouz Sohi; Hanspeter Oldrati; and Roland Sommer.
The application for the patent was published on August 28, 2026, under issue no. 35/2026.
Abstract: Abstract The invention relates to a sensor device (1) designed to measure a pressure (P); comprising at least one base body (10) and at least one sensor material (20), which base body (10) is formed in some areas as a base body diaphragm (11), which base body diaphragm (11) has a thickness (T11) along a vertical axis (Z) and a diameter (D11) in a horizontal plane (XY) perpendicular to the vertical axis (Z); which base body diaphragm (11) is designed to sense the pressure (P) to be measured and which base body diaphragm (11) can be deflected along the vertical axis (Z) under the effect of the pressure (P); wherein the sensor material (20) is arranged on the base body diaphragm (11), which sensor material (20) generates piezoelectric charge (Q20+, Q20-) under the effect of the deflection of the base body diaphragm (11) and an amount of the piezoelectric charge (Q20+, Q20-) generated is proportional to the magnitude of the measured pressure (P); wherein the thickness (T11) of the base body diaphragm (11) is less than/equal to 20 µm, preferably less than/equal to 10 µm, preferably less than/equal to 5 µm; wherein the diameter (D11) of the base body diaphragm (11) is less than/equal to 300 µm, preferably less than/equal to 200 µm, preferably less than/equal to 100 µm; and wherein a ratio of the thickness (T11) to the diameter (D11) of the base body diaphragm (11) is selected in such a way that the sensor device (1) has a natural frequency (f1) of greater than/equal to 1 MHz. (Fig. 1)
Disclaimer: Curated by HT Syndication.
