MUMBAI, India, June 19 -- Intellectual Property India has published a patent application (202647066677 A) filed by Asml Netherlands B. V. on May 27, 2026, for Reticle Load Lock System And Method.
Inventors include Harrold, George, Hilary; and Wade, Robert, Jeffrey.
The application for the patent was published on June 05, 2026, under issue no. 23/2026.
Abstract: A reticle load lock having a valve with a variable size orifice, or servo valving, is described. Servo valving can continually adjust the size of the orifice such that the reticle load lock can pump or vent at an optimal level. The servo valving pressure profile follows an optimized pressure rate to protect the structural integrity of the pellicle. The optimized servo valving curves minimize the evacuation and vent times without exceeding the pressure rate (dP/dt) limits. By following the optimized pressure rate curve, servo valving significantly reduces the time to pump down and vent and prevents breakage of the pellicle.
Disclaimer: Curated by HT Syndication.
