MUMBAI, India, June 19 -- Intellectual Property India has published a patent application (202647066344 A) filed by Asml Netherlands B. V. on May 26, 2026, for Radiation Spectrum Configuration System.
Inventors include Buijs, Robin, Daniel; Abdolvand, Amir; and Belli, Federico.
The application for the patent was published on June 05, 2026, under issue no. 23/2026.
Abstract: A radiation source, a metrology tool, a lithographic apparatus and a method of generating an acoustic mode in a gas medium are provided. The radiation spectrum configuration system comprising a hollow optical waveguide and one or more transducers. The hollow optical waveguide contains a gas medium. The one or more transducers are configured to generate an acoustic mode in the gas medium.
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