MUMBAI, India, July 31 -- Intellectual Property India has published a patent application (202647089054 A) filed by Cymer, LLC on July 22, 2026, for Pre-Ionization Tube For Acoustics Mitigation In Light Source.
Inventors include Dou, Yong; and Wang, Zhou.
The application for the patent was published on July 24, 2026, under issue no. 30/2026.
Abstract: A lithography system includes a light source. The light source generates radiation in a chamber, which includes a first electrode, a second electrode, and pre-ionization tube. A first surface of the first electrode and a first surface of the second electrode face inwards towards a discharge region. The pre-ionization tube can be adjacent to a second surface of either the first electrode or the second electrode. Altering the position of the pre-ionization tube can reduce acoustic effects in the chamber during discharge of the light source. The pre-ionization tube can be tilted by moving one end of the pre-ionization tube towards the discharge region.
Disclaimer: Curated by HT Syndication.
