MUMBAI, India, Aug. 10 -- Intellectual Property India has published a patent application (202647091391 A) filed by Entegris, Inc. on July 28, 2026, for Multi-Metal Oxide Coatings, Related Devices And Methods.
Inventors include Sang, Baosheng; Gunda, Nilesh; and Angeloni, Samuel J..
The application for the patent was published on July 31, 2026, under issue no. 31/2026.
Abstract: Multi-metal oxide coatings, and related devices and related methods are provided, among other things. A device comprises a substrate, and a coating on the substrate. The coating comprises a multi-metal oxide. The multi-metal oxide comprises a first species and a second species. A concentration of at least one of the first species, the second species, or any combination thereof, varies through a thickness of the coating. The device can be a component used in a semiconductor manufacturing process.
Disclaimer: Curated by HT Syndication.
