MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647084647 A) filed by Cymer, LLC on July 10, 2026, for Methods And Systems For Providing Loopback Diagnostics.
Inventors include Knight, Laura, Elizabeth; and Kaseff, Charles, Abraham.
The application for the patent was published on July 17, 2026, under issue no. 29/2026.
Abstract: Methods and systems for validating one or more sensors, one or more circuit boards, one or more connectors, or the like in lithographic apparatuses and systems are provided. For example, a metrology system (600) includes a first circuit board (603) including a sensor (611) and a multiplexer (613) configured to receive a first analog signal (621) corresponding to a first digital signal (619)) and output a second analog signal (625). The metrology system (600) further includes a second circuit board (601) including a processor (605) configured to generate the first digital signal (619). The processor (605) is further configured to receive a second digital signal (631) corresponding to the second analog signal (625) output from the multiplexer (613). The processor (605) is further configured to determine whether a fault exists in one or more of the first circuit board (603), the second circuit board (601), or a connection between the first circuit board (603) and the second circuit board (601) based on the received second digital signal (631).
Disclaimer: Curated by HT Syndication.
