MUMBAI, India, Sept. 28 -- Intellectual Property India has published a patent application (202647110570 A) filed by Entegris, Inc. on September 15, 2026, for Level Sensors For Precursor Vessels And Related Systems And Related Methods.
Inventors include Peters, David W.; Hendrix, Bryan C.; and Moghaddam, Sara.
The application for the patent was published on September 25, 2026, under issue no. 39/2026.
Abstract: Some embodiments of the present disclosure relate to a system, comprising a vessel; at least one tray located in the vessel; a tube extending into the vessel to a location beneath the at least one tray; and a level sensor comprising: at least one reed switch located on the tube; and at least one toroidal magnet, wherein the tube extends through an opening defined by the at least one toroidal magnet, such that the at least one toroidal magnet is slidably engaged with the tube; wherein, when a solid precursor is loaded onto the at least one tray, the at least one toroidal magnet is configured to rest on a surface of the solid precursor; wherein the level sensor is configured to sense changes in the location of the at least one toroidal magnet relative to the at least one reed switch to sense precursor levels within the vessel. Also described is a vessel for delivering solid precursor vapor where a sensor or heater is connected through a gas exchange port of the vessel.
Disclaimer: Curated by HT Syndication.
