MUMBAI, India, June 26 -- Intellectual Property India has published a patent application (202514115158 A) filed by Ebara Corporation on November 21, 2025, for Information Processing Apparatus.
Inventor includes Takubo Shinya -.
The application for the patent was published on June 19, 2026, under issue no. 25/2026.
Abstract: An information processing apparatus (3) executes, on substrate processing units and a substrate transport unit, first mathematical optimization for determining a start timing of each process on a substrate without setting an exclusive processing condition for selecting one of two processes as a constraint condition of the mathematical optimization, and determines whether there is a substrate processing unit or a substrate transport unit executing processes that are not simultaneously executable based on a result. The apparatus (3) executes second mathematical optimization of determining a start timing of each process on the substrate on the substrate processing unit or the substrate transport unit determined to execute the processes that are not simultaneously executable by adding an exclusive processing condition for determining which process is prioritized between the two processes that are not simultaneously executable among the processes on the substrate to the constraint condition of the first mathematical optimization.
Disclaimer: Curated by HT Syndication.
