MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647086062 A) filed by Merck Patent Gmbh on July 14, 2026, for Group 13 Metal Compounds For Ald Applications.
Inventors include Mai, Lukas; Maturi, Mark Marcello; Mehlmann, Paul; and Heil, Holger.
The application for the patent was published on July 17, 2026, under issue no. 29/2026.
Abstract: The present invention relates to aluminum, gallium and indium metal complexes and a method of using these complexes as precursors for deposition of metal-containing films, in particular by atomic layer deposition.
Disclaimer: Curated by HT Syndication.
