MUMBAI, India, Nov. 2 -- Intellectual Property India has published a patent application (202647127814 A) filed by Applied Materials, Inc. on October 27, 2026, for Dynamic Frequency Tuning For Microwave Power Amplifiers.
Inventors include Yang, Xiaokang; Seshadri, Vishesh; Ravikiran, Manasakiran; Sawalkar, Saloni; and Baluja, Sanjeev.
The application for the patent was published on October 30, 2026, under issue no. 44/2026.
Abstract: In some aspects, the embodiments described herein relate to a method for tuning a frequency of microwave power delivered to a chamber, including striking a plasma in the chamber. Embodiments may further comprise scanning the frequency from a first frequency to a second frequency, where a set point frequency in a range from the first frequency to the second frequency has a lowest reflected power. In an embodiment, the method further includes setting the frequency of the microwave power delivered to the chamber to the set point frequency. The method may further include changing the set point frequency when a measure of reflected power exceeds a threshold.
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