MUMBAI, India, Oct. 26 -- Intellectual Property India has published a patent application (202621107051 A) filed by Hetalben Hirenkumar Savaliya; and Hirenkumar Vallabhbhai Savaliya on September 05, 2026, for Distributed-Phase 915 Mhz Clamshell Mpcvd Reactor For 150 Mm To 600 Mm Polycrystalline Diamond Wafers.
Inventor includes Hirenkumar Vallabhbhai Savaliya.
The application for the patent was published on October 23, 2026, under issue no. 43/2026.
Abstract: A microwave-plasma chemical-vapour-deposition reactor (100) for a polycrystalline-diamond wafer (139) of about 600 mm diameter has a fixed lower assembly (101) and a movable upper assembly (102) joined at a clamshell joint (103) and defining an oversized multimode cavity (105). A microwave generator (111) delivers about 100 kW at 915 MHz through a circulator (112) and load (113) to a power divider (205), which divides the power among eight distribution channels each having a power-control element (206), phase shifter (116), detector (114) and tuner (115), so that energy at every port (120) is mutually coherent. A three-zone showerhead (134) serves a rotating susceptor assembly (138) having a molybdenum plate (208) on a graphite body (210) through a thermal barrier (209), a guard ring (207) and zoned cooling (171-173). A spatial diagnostic system (198) and a process model (197) adjust channel power and phase, zonal gas and coolant.
Disclaimer: Curated by HT Syndication.
