MUMBAI, India, Oct. 5 -- Intellectual Property India has published a patent application (202641114471 A) filed by Vallurupalli Nageswara Rao Vignana Jyothi Institute Of Engineering And Technology on September 24, 2026, for An Optimized Gold-Based Rf Mems Series Switch Employing A Perforated Serpentine Meander Beam For Low-Voltage, Fast-Switching And High Frequency Applications.

Inventor includes Dr. G. Shanthi.

The application for the patent was published on October 02, 2026, under issue no. 40/2026.

Abstract: ABSTRACT [0029] The increasing increasing requirement for compact, low-energy, and high-frequency components in contemporary wireless communication systems has stimulated huge interest in RF MEMS (Radio Frequency Micro-Electro-Mechanical Systems) switches. This thesis describes the design, simulation, and analysis of a gold-based RF MEMS series switch with a serpentine-type meander beam structure with the objective of low actuation voltage, better mechanical reliability, and better RF performance. Important performance parameters like pull-in voltage, switching time, stress analysis, and capacitance ratio are comprehensively analysed. Perforation geometries and beam sizes were analyzed to minimize structural stiffness and reduce the pull-in voltage, with simulations performed in COMSOL Multiphysics for mechanical characteristics and ANSYS HFSS for RF characteristics. [0030] The optimized structure attains a low pull-in voltage of 3.1 V, a high capacitance ratio of 69.7, and a short switching time of 4.4 µs. Moreover, the switch also exhibits good RF performance with an insertion loss of 0.21 dB and a return loss of -21 dB. In addition to the main research and to extend the study of MEMS-based applications, this research also involves modelling and simulating mechanical strain sensors in COMSOL Multiphysics. There were three sensor geometries designed and simulated under different pressure loads, namely triangular, rectangular, and circular. The simulations were aimed at determining von Mises stress distributions and structural deformations to determine the effect of geometry on mechanical performance. The results demonstrate significant differences in stress concentration, deformation patterns, and mechanical robustness between the sensor geometries. These simulations give valuable insight into the optimization of sensor configurations for biomedical monitoring, structural health diagnosis, and industrial sensing applications. The outcomes of this thesis collectively advance MEMS technology with scalable and effective solutions for next-generation wireless and sensing systems.

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