MUMBAI, India, Sept. 28 -- Intellectual Property India has published a patent application (202641112238 A) filed by Chennai Institute Of Technology on September 18, 2026, for An Ai-Driven Autonomous Digital Twin System For Real-Time Semiconductor Equipment Monitoring, Fault Diagnosis And Predictive Maintenance.
Inventors include Dr. S. Aathilakshmi; Mr. V. Prem Sangeeth; Mr. P. Ramesh Raja; Mr. K. Ashwin Kumar; and Mr. A. Dhamarai Kannan.
The application for the patent was published on September 25, 2026, under issue no. 39/2026.
Abstract: This patent application concerns an intelligent semiconductor equipment monitoring and predictive maintenance system utilizing edge computing, FPGA processing, artificial intelligence (AI), and digital twins. This system includes industrial sensors, ESP32 edge controller, FPGA processing module with fault injection capability, Raspberry Pi edge computing unit, a server, digital twin engine, AI multi-agent system, and web monitoring dashboard. The current operational data is collected, processed, analyzed, and synchronized with the digital twin to provide continuous equipment monitoring and predictive simulation capabilities. The AI system detects anomalies, performs root cause analysis, provides predictive maintenance recommendations, forecasts the yields and automatically generates reports for maintenance activities. The current invention provides reduced downtime of equipment, increased reliability and efficiency of operation and optimization of maintenance schedule. This modular and scalable solution allows for integration with various semiconductor equipment and communication protocols making possible reliable Industry 4.0 based smart manufacturing solutions.
Disclaimer: Curated by HT Syndication.
