MUMBAI, India, Sept. 22 -- Intellectual Property India has published a patent application (202641087577 A) filed by Makr Microsystems Private Limited on July 17, 2026, for A Unibody Two Stage Afm Cantilever.
Inventors include Ashwin Lal; Mohanasundaram S M; Sai Shiva Teja Panchadhara; and Dorbala Sai Naga Bharghava.
The application for the patent was published on September 18, 2026, under issue no. 38/2026.
Abstract: A UNIBODY TWO STAGE AFM CANTILEVER The invention provides a unibody two stage AFM cantilever and method for forming the same. The cantilever includes a first cantilever section and a second cantilever section having different stiffnesses, with the second cantilever section configured for contact mode interaction and the first cantilever section configured for resonant AC excitation. The structure enables simultaneous acquisition of topography and dynamic response information, including viscoelastic and subsurface features, using a single monolithic probe. The device is fabricated from a silicon-on-insulator substrate by patterning, etching, thinning, and releasing the cantilever sections to form a stepped profile and an integral sharp tip. FIG. 2
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