MUMBAI, India, Oct. 5 -- Intellectual Property India has published a patent application (202611104392 A) filed by Nims University Rajasthan, Jaipur on August 25, 2026, for A Nanocrystalline Zinc Oxide Gas Sensor System And Method Thereof.
Inventors include Rajesh Kumar; and Dr. Sudhir Kumar Mishra.
The application for the patent was published on October 02, 2026, under issue no. 40/2026.
Abstract: A low-power micro-electro-mechanical systems (MEMS) gas sensor system (100) and a method thereof are disclosed. The system comprises a silicon substrate (101), a dielectric membrane (102) disposed thereon, and a cavity (103) defined beneath the dielectric membrane (102) for thermal isolation. A nickel-based microheater (104) is disposed on the dielectric membrane (102), followed by an insulating layer (105) and interdigitated electrodes (106). A nanocrystalline zinc oxide sensing layer (107) is disposed over the interdigitated electrodes (106) along with at least one catalytic metal contact (108). The system further comprises a temperature control unit (109), a signal acquisition module (110), a processing unit (111), an output interface (112), and a power supply unit (113). The method comprises heating, baseline measurement, gas exposure, resistance detection, signal processing, and output generation. The invention enables low power consumption, improved thermal efficiency, enhanced sensitivity, and real-time gas detection.
Disclaimer: Curated by HT Syndication.
