MUMBAI, India, Nov. 21 -- Intellectual Property India has published a patent application (202521105718 A) filed by Marwadi University, Rajkot, Gujarat, on Oct. 31, for 'autonomous llm-driven system for semiconductor fabrication.'
Inventor(s) include Deepika Reddy C; S Veera Reddy; S Shiva Krishna; Dr. Madhu Shukla; Simrin Fathima Syed; Vipul Ladva; Akshay Ranpariya; and Neel Dholakia.
The application for the patent was published on Nov. 21, under issue no. 47/2025.
According to the abstract released by the Intellectual Property India: "An autonomous LLM-driven system for semiconductor fabrication, comprises of a platform 101 configured to be mounted within a processing chamber 102 of a semiconductor fabrication machine, a vacuum unit 103 to grip a passive thin silicon disc securely, a vibration damping unit to counter vibrations during operation, a tilt mitigation unit to balance the platform 101 during operation, a self-cleaning contamination regulation unit to discharge mist for particle neutralization and residue collection, a sensor suite for monitoring real-time environmental conditions, to trigger real-time countermeasures, a cyber-physical security framework for detecting tampering, ciphers each command of the L-PCU to prevent hacks and updates actions in a linked database, to ensure access to only authorized users, and a local processing unit (L-PCU) mounted in a sealed compartment 116."
Disclaimer: Curated by HT Syndication.
